Difference between revisions of "Vacuum Deposition Recipes"

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{{Recipe Table Explanation}}
  
{{Recipe Table Explanation}}
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{| class="wikitable" border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;"
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! colspan="18" width="1675" height="45" | <div style="font-size: 150%;">Vacuum Deposition Recipes</div>
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! width="1675" height="45" colspan="18" | <div style="font-size: 150%;">Vacuum Deposition Recipes</div>
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|- bgcolor="#d0e7ff"
 
| <!-- INTENTIONALLY LEFT BLANK --> <br>
 
| <!-- INTENTIONALLY LEFT BLANK --> <br>
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! colspan="4" bgcolor="#D0E7FF" align="center" | '''[[E-Beam Evaporation Recipes|E-Beam Evaporation]]'''
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! align="center" bgcolor="#d0e7ff" colspan="4" | '''[[E-Beam Evaporation Recipes|E-Beam Evaporation]]'''
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! colspan="6" bgcolor="#D0E7FF" align="center" | '''[[Sputtering Recipes|Sputtering]]'''
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! align="center" bgcolor="#d0e7ff" colspan="6" | '''[[Sputtering Recipes|Sputtering]]'''
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! colspan="2" bgcolor="#D0E7FF" align="center" | '''[[Thermal Evaporation Recipes|Thermal Evaporation]]'''
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! align="center" bgcolor="#d0e7ff" colspan="2" | '''[[Thermal Evaporation Recipes|Thermal Evaporation]]'''
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! colspan="3" bgcolor="#D0E7FF" align="center" | '''[[PECVD Recipes|Plasma Enhanced Chemical<br>Vapor Deposition (PECVD)]]'''
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! align="center" bgcolor="#d0e7ff" colspan="3" | '''[[PECVD Recipes|Plasma Enhanced Chemical<br>Vapor Deposition (PECVD)]]'''
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! width="90" bgcolor="#D0E7FF" align="center" | '''[[Atomic Layer Deposition Recipes|Atomic Layer Deposition]]'''
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! width="90" align="center" bgcolor="#d0e7ff" | '''[[Atomic Layer Deposition Recipes|Atomic Layer Deposition]]'''
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! width="80" bgcolor="#D0E7FF" align="center" | '''[[Molecular Vapor Deposition Recipes|Molecular Vapor Deposition]]'''
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! width="80" align="center" bgcolor="#d0e7ff" | '''[[Molecular Vapor Deposition Recipes|Molecular Vapor Deposition]]'''
 
|-
  
|-
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! width="20" bgcolor="#D0E7FF" align="center" | '''Material'''
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! width="20" align="center" bgcolor="#d0e7ff" | '''Material'''
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| width="65" bgcolor="#DAF1FF" | [[E-Beam Evaporation Recipes#E-Beam_1_.28Sharon.29|E-Beam 1 (Sharon)]]
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| width="65" bgcolor="#daf1ff" | [[E-Beam Evaporation Recipes#E-Beam_1_.28Sharon.29|E-Beam 1 (Sharon)]]
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| width="65" bgcolor="#DAF1FF" | [[E-Beam Evaporation Recipes#E-Beam_2_.28Custom.29|E-Beam 2 (Custom)]]
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| width="65" bgcolor="#daf1ff" | [[E-Beam Evaporation Recipes#E-Beam_2_.28Custom.29|E-Beam 2 (Custom)]]
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| width="65" bgcolor="#DAF1FF" | [[E-Beam Evaporation Recipes#E-Beam_3_.28Temescal.29|E-Beam 3 (Temescal)]]
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| width="65" bgcolor="#daf1ff" | [[E-Beam Evaporation Recipes#E-Beam_3_.28Temescal.29|E-Beam 3 (Temescal)]]
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| width="65" bgcolor="#DAF1FF" | [[E-Beam Evaporation Recipes#E-Beam_4_.28CHA.29|E-Beam 4 (CHA)]]
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| width="65" bgcolor="#daf1ff" | [[E-Beam Evaporation Recipes#E-Beam_4_.28CHA.29|E-Beam 4 (CHA)]]
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| width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter_1_.28Custom.29|Sputter 1 (Custom)]]
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| width="65" bgcolor="#daf1ff" | [[Sputtering Recipes#Sputter_1_.28Custom.29|Sputter 1 (Custom)]]
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| width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter_2_.28SFI_Endeavor.29|Sputter 2<br>(SFI Endeavor)]]
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| width="65" bgcolor="#daf1ff" | [[Sputtering Recipes#Sputter_2_.28SFI_Endeavor.29|Sputter 2<br>(SFI Endeavor)]]
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| width="65" bgcolor="#DAF1FF" | [[Sputtering_Recipes#Sputter_3_.28AJA_ATC_2000-F.29|Sputter 3<br>(ATC 2000-F)]]
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| width="65" bgcolor="#daf1ff" | [[Sputtering_Recipes#Sputter_3_.28AJA_ATC_2000-F.29|Sputter 3<br>(ATC 2000-F)]]
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| width="65" bgcolor="#DAF1FF" | [[Sputtering_Recipes#Sputter_4_.28AJA_ATC_2200-V.29|Sputter 4<br>(ATC 2200-V)]]
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| width="65" bgcolor="#daf1ff" | [[Sputtering_Recipes#Sputter_4_.28AJA_ATC_2200-V.29|Sputter 4<br>(ATC 2200-V)]]
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| width="65" bgcolor="#DAF1FF" | [[Sputtering Recipes#Sputter_5_.28Lesker_AXXIS.29|Sputter 5 (Lesker AXXIS)]]
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| width="65" bgcolor="#daf1ff" | [[Sputtering Recipes#Sputter_5_.28Lesker_AXXIS.29|Sputter 5 (Lesker AXXIS)]]
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| width="55" bgcolor="#DAF1FF" | [[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|Ion Beam<br>Deposition (Veeco Nexus)]]
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| width="55" bgcolor="#daf1ff" | [[Sputtering_Recipes#Ion_Beam_Deposition_.28Veeco_NEXUS.29|Ion Beam<br>Deposition (Veeco Nexus)]]
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| width="45" bgcolor="#DAF1FF" | [[Thermal Evaporation Recipes#Thermal_Evap_1|Thermal<br>Evap 1]]
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| width="45" bgcolor="#daf1ff" | [[Thermal Evaporation Recipes#Thermal_Evap_1|Thermal<br>Evap 1]]
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| width="65" bgcolor="#DAF1FF" | [[Thermal Evaporation Recipes#Thermal_Evap_2_.28Solder.29|Thermal Evap 2 (Solder)]]
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| width="65" bgcolor="#daf1ff" | [[Thermal Evaporation Recipes#Thermal_Evap_2_.28Solder.29|Thermal Evap 2 (Solder)]]
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| width="65" bgcolor="#DAF1FF" | [[PECVD Recipes#PECVD_1_.28PlasmaTherm_790.29|PECVD 1<br>(PlasmaTherm 790)]]
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| width="65" bgcolor="#daf1ff" | [[PECVD Recipes#PECVD_1_.28PlasmaTherm_790.29|PECVD 1<br>(PlasmaTherm 790)]]
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| width="65" bgcolor="#DAF1FF" | [[PECVD Recipes#PECVD_2_.28Advanced_Vacuum.29|PECVD 2<br>(Advanced Vacuum)]]
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| width="65" bgcolor="#daf1ff" | [[PECVD Recipes#PECVD_2_.28Advanced_Vacuum.29|PECVD 2<br>(Advanced Vacuum)]]
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| width="65" bgcolor="#DAF1FF" | [[PECVD_Recipes#ICP-PECVD_.28Unaxis_VLR.29|Unaxis VLR ICP-PECVD]]
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| width="65" bgcolor="#daf1ff" | [[PECVD_Recipes#ICP-PECVD_.28Unaxis_VLR.29|Unaxis VLR ICP-PECVD]]
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| width="65" bgcolor="#DAF1FF" | [[Atomic_Layer_Deposition_Recipes|Atomic Layer Deposition (Oxford FlexAL)]]
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| width="65" bgcolor="#daf1ff" | [[Atomic_Layer_Deposition_Recipes|Atomic Layer Deposition (Oxford FlexAL)]]
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| width="65" bgcolor="#DAF1FF" | [[Molecular Vapor Deposition|Molecular Vapor Deposition (Tool)]]
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| width="65" bgcolor="#daf1ff" | [[Molecular Vapor Deposition|Molecular Vapor Deposition (Tool)]]
 
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| width="45" bgcolor="#DAF1FF" | [[Thermal Evaporation Recipes#Thermal_Evap_1|Thermal<br>Evap 1]]
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| width="65" bgcolor="#DAF1FF" | [[PECVD Recipes#PECVD_1_.28PlasmaTherm_790.29|PECVD 1<br>(PlasmaTherm 790)]]
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| width="65" bgcolor="#DAF1FF" | [[PECVD_Recipes#ICP-PECVD_.28Unaxis_VLR.29|Unaxis VLR ICP-PECVD]]
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| width="65" bgcolor="#DAF1FF" | [[Atomic_Layer_Deposition_Recipes|Atomic Layer Deposition (Oxford FlexAl)]]
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Revision as of 08:42, 19 September 2017

  • R = Recipe is available. Clicking this link will take you to the recipe.
  • A = Material is available for use, but no recipes are provided.
Vacuum Deposition Recipes

 E-Beam Evaporation Sputtering Thermal Evaporation Plasma Enhanced Chemical
Vapor Deposition (PECVD) 		Atomic Layer Deposition Molecular Vapor Deposition
Material E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 1 (Custom) Sputter 2
(SFI Endeavor) 		Sputter 3
(ATC 2000-F) 		Sputter 4
(ATC 2200-V) 		Sputter 5 (Lesker AXXIS) Ion Beam
Deposition (Veeco Nexus) 		Thermal
Evap 1 		Thermal Evap 2 (Solder) PECVD 1
(PlasmaTherm 790) 		PECVD 2
(Advanced Vacuum) 		Unaxis VLR ICP-PECVD Atomic Layer Deposition (Oxford FlexAL) Molecular Vapor Deposition (Tool)
Ag A
A A

A A








Al A
A A
R A R

A A




Al2O3 A A



A A
A




R
AlN




R A A
A




R
Au A
A A
R A R

A A




B
















C R
CeO2
R














Co A

A

R









Cr A

A

R


A A




Cu A




A R A








Fe A

A

R









Ge A
A A

A A








GeO2 A
Gd A

A












Hf A















HfO2





A A






R
In










A




Ir A















ITO
R



A A
A






MgF2 A A
MgO A
Mo A




R A








Nb A





R








Nd





A








Ni A
A A

R


A A




NiCr A A
NiFe A A A
Pd A
A A





A A




Pt A
A A

A R






R
Ru A

A












Si
A



R A




R R

SiN





R A
R

R R R

SiO2 A A



R A A R

R R R R
SiOxNy








A

R



Sn










A




SrF2
A














Ta A




R A








Ta2O5


A




R






Ti A
A A

A R R








TiN




A
R
A




R
TiW A




A R








TiO2
A


R A A R
R




R
V





A A








W A




A R








Zn









A A




ZnO














R
Zr A

A

A A








ZrO2














R
Material E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 1 (Custom) Sputter 2
(SFI Endeavor) 		Sputter 3
(ATC 2000-F) 		Sputter 4
(ATC 2200-V) 		Sputter 5 (Lesker AXXIS) Ion Beam
Deposition (Veeco Nexus) 		Thermal
Evap 1 		Thermal Evap 2 (Solder) PECVD 1
(PlasmaTherm 790) 		PECVD 2
(Advanced Vacuum) 		Unaxis VLR ICP-PECVD Atomic Layer Deposition (Oxford FlexAl) Molecular Vapor Deposition (Tool)
Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Vacuum_Deposition_Recipes&oldid=154431"