UV Ozone Reactor

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UV Ozone Reactor
Ozone.jpg
Tool Type Dry Etch
Location Bay 5
Supervisor Lee Sawyer
Supervisor Phone (805) 893-2123
Supervisor E-Mail lee_sawyer@ucsb.edu
Description UV Ozone Reactor
Manufacturer Jelight
Model M-144AX
Dry Etch Recipes


About

The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.

Documentation

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=UV_Ozone_Reactor&oldid=156742"