UV Ozone Reactor

From UCSB Nanofab Wiki
Revision as of 15:57, 17 July 2018 by John d (talk | contribs) (add description and model)
Jump to navigation Jump to search
The printable version is no longer supported and may have rendering errors. Please update your browser bookmarks and please use the default browser print function instead.
UV Ozone Reactor
Ozone.jpg
Tool Type Dry Etch
Location Bay 5
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description UV Ozone Reactor
Manufacturer Jelight
Model M-144AX
Dry Etch Recipes


About

The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.

Operating Procedures

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=UV_Ozone_Reactor&oldid=155296"