UV Ozone Reactor

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UV Ozone Reactor
Ozone.jpg
Tool Type Dry Etch
Location Bay 5
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description ?
Manufacturer ?
Dry Etch Recipes


About

Operating Procedures

  • Quick Start
  • [Media:UV Ozone Manual Jelight M-144AX.pdf]