UV Ozone Reactor

From UCSB Nanofab Wiki
Revision as of 14:53, 17 July 2018 by John d (talk | contribs) (link to Quick start from TBosch email, and user manual PDF)
Jump to: navigation, search
UV Ozone Reactor
Tool Type Dry Etch
Location Bay 5
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description ?
Manufacturer ?
Dry Etch Recipes


Operating Procedures

Quick Start Media:UV Ozone Manual Jelight M-144AX.pdf