Difference between revisions of "UV Ozone Reactor"
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|type = Dry Etch |
|type = Dry Etch |
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|super= Tony Bosch |
|super= Tony Bosch |
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| + | |model=M-144AX |
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|location=Bay 5 |
|location=Bay 5 |
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| − | |description = |
+ | |description = UV Ozone Reactor |
| − | |manufacturer = |
+ | |manufacturer = Jelight |
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== About == |
== About == |
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| + | The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment. |
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== Operating Procedures == |
== Operating Procedures == |
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* [[UV Ozone Quick Start|Quick Start]] |
* [[UV Ozone Quick Start|Quick Start]] |
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| − | * [Media:UV Ozone Manual Jelight M-144AX.pdf] |
+ | * [[Media:UV Ozone Manual Jelight M-144AX.pdf|UV Ozone Manual]] |
Revision as of 15:57, 17 July 2018
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About
The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.