Difference between revisions of "UV Ozone Reactor"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
(link to Quick start from TBosch email, and user manual PDF)
m (bullet list)
Line 7: Line 7:
 
|manufacturer = ?
 
|manufacturer = ?
 
}}
 
}}
= About =
+
== About ==
   
 
== Operating Procedures ==
 
== Operating Procedures ==
[[UV Ozone Quick Start|Quick Start]]
+
* [[UV Ozone Quick Start|Quick Start]]
[[Media:UV Ozone Manual Jelight M-144AX.pdf]]
+
* [Media:UV Ozone Manual Jelight M-144AX.pdf]

Revision as of 15:53, 17 July 2018

UV Ozone Reactor
Ozone.jpg
Tool Type Dry Etch
Location Bay 5
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description ?
Manufacturer ?
Dry Etch Recipes


About

Operating Procedures

  • Quick Start
  • [Media:UV Ozone Manual Jelight M-144AX.pdf]