Difference between revisions of "UV Ozone Reactor"
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|picture=Ozone.jpg |
|picture=Ozone.jpg |
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|type = Dry Etch |
|type = Dry Etch |
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+ | |super= Lee Sawyer |
|model=M-144AX |
|model=M-144AX |
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|location=Bay 5 |
|location=Bay 5 |
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Revision as of 10:46, 11 April 2019
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About
The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.