Difference between revisions of "UV Ozone Reactor"

From UCSB Nanofab Wiki
Jump to: navigation, search
(About)
(heading change)
 
Line 8: Line 8:
 
|manufacturer = Jelight
 
|manufacturer = Jelight
 
}}
 
}}
== About ==
+
==About==
 
The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.
 
The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.
   
  +
==Documentation==
== Operating Procedures ==
 
  +
* [[UV Ozone Quick Start|Quick Start]]
 
* [[Media:UV Ozone Manual Jelight M-144AX.pdf|UV Ozone Manual]]
+
*[[UV Ozone Quick Start|Quick Start]]
  +
*[//www.nanotech.ucsb.edu/wiki/images/7/79/UV_Ozone_Manual_Jelight_M-144AX.pdf UV Ozone Manual]

Latest revision as of 14:33, 11 September 2019

UV Ozone Reactor
Ozone.jpg
Tool Type Dry Etch
Location Bay 5
Supervisor Lee Sawyer
Supervisor Phone (805) 893-2123
Supervisor E-Mail lee_sawyer@ucsb.edu
Description UV Ozone Reactor
Manufacturer Jelight
Model M-144AX
Dry Etch Recipes


About

The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.

Documentation