Difference between revisions of "UV Ozone Reactor"

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|type = Dry Etch
 
|type = Dry Etch
 
|super= Tony Bosch
 
|super= Tony Bosch
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|model=M-144AX
 
|location=Bay 5
 
|location=Bay 5
|description = ?
+
|description = UV Ozone Reactor
|manufacturer = ?
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|manufacturer = Jelight
 
}}
 
}}
 
== About ==
 
== About ==
  +
The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.
   
 
== Operating Procedures ==
 
== Operating Procedures ==
 
* [[UV Ozone Quick Start|Quick Start]]
 
* [[UV Ozone Quick Start|Quick Start]]
* [Media:UV Ozone Manual Jelight M-144AX.pdf]
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* [[Media:UV Ozone Manual Jelight M-144AX.pdf|UV Ozone Manual]]

Revision as of 14:57, 17 July 2018

UV Ozone Reactor
Ozone.jpg
Tool Type Dry Etch
Location Bay 5
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description UV Ozone Reactor
Manufacturer Jelight
Model M-144AX
Dry Etch Recipes


About

The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.

Operating Procedures