Difference between revisions of "UV Ozone Reactor"

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(link to Quick start from TBosch email, and user manual PDF)
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|manufacturer = ?
 
|manufacturer = ?
 
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= About =
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== About ==
   
 
== Operating Procedures ==
 
== Operating Procedures ==
[[UV Ozone Quick Start|Quick Start]]
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* [[UV Ozone Quick Start|Quick Start]]
[[Media:UV Ozone Manual Jelight M-144AX.pdf]]
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* [Media:UV Ozone Manual Jelight M-144AX.pdf]

Revision as of 14:53, 17 July 2018

UV Ozone Reactor
Ozone.jpg
Tool Type Dry Etch
Location Bay 5
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description ?
Manufacturer ?
Dry Etch Recipes


About

Operating Procedures

  • Quick Start
  • [Media:UV Ozone Manual Jelight M-144AX.pdf]