Difference between revisions of "UV Ozone Reactor"

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(Created page with "{{tool|{{PAGENAME}} |picture=Ozone.jpg |type = Dry Etch |super= Tony Bosch |location=Bay 5 |description = ? |manufacturer = ? }} = About =")
 
(link to Quick start from TBosch email, and user manual PDF)
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= About =
 
= About =
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== Operating Procedures ==
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[[UV Ozone Quick Start|Quick Start]]
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[[Media:UV Ozone Manual Jelight M-144AX.pdf]]

Revision as of 14:53, 17 July 2018

UV Ozone Reactor
Ozone.jpg
Tool Type Dry Etch
Location Bay 5
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description ?
Manufacturer ?
Dry Etch Recipes


About

Operating Procedures

Quick Start Media:UV Ozone Manual Jelight M-144AX.pdf