Tool List
Revision as of 11:04, 4 June 2019 by John d (talk | contribs) (→Thermal Processing: linked to new Ovens Overview page, reorganized ovens under this, removed Strip Annealer link (removed from lab))
Lithography
You can see our available photoresists on the Chemical Datasheets page.
Contact Aligners (Optical Exposure)Other Patterning Systems |
Steppers (Optical Exposure)Thermal Processing for Photolithography
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Vacuum Deposition
Physical Vapor Deposition (PVD)
Sputter Deposition |
Chemical Vapor Deposition (CVD) |
Dry Etch
Reactive Ion Etching (RIE)
Etch Monitoring
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ICP-RIE
Other Dry Etching |
Wet Processing
See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.