Tool List

Lithography

Suss Aligners (SUSS MJB-3) IR Aligner (SUSS MJB-3 IR) DUV Flood Expose Ovens 1, 2 & 3 (Labline) Oven 4 (Fisher) Oven 5 (Blue M) Vacuum Oven (YES) Holographic Lith/PL Setup (Custom)

Stepper 1 (GCA 6300) Stepper 2 (AutoStep 200) Stepper 3 (ASML DUV) E-Beam Lithography System (JEOL JBX-6300FS) Nano-Imprint (Nanonex NX2000) Contact Aligner (SUSS MA-6) Wafer Bonder (SUSS SB6-8E)

Vacuum Deposition

E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 1 (Custom) Sputter 2 (SFI Endeavor) Sputter 3 (ATC 2000-F) Sputter 4 (ATC 2200-V) Sputter 5 (Lesker AXXIS)

PECVD 1 (PlasmaTherm 790) PECVD 2 (Advanced Vacuum) Thermal Evap 1 Thermal Evap 2 (Solder) Unaxis VLR ICP-PECVD Ion Beam Deposition (Veeco NEXUS) Molecular Vapor Deposition Atomic Layer Deposision (Oxford FlexAL)

Dry Etch

RIE 1 (Custom) RIE 2 (MRC) RIE 3 (MRC) RIE 5 (PlasmaTherm) Si Deep RIE (PlasmaTherm/Bosch Etch) Ashers (Technics PEII) Unaxis VLR ICP-Etch

ICP Etch 1 (Panasonic E626I) ICP Etch 2 (Panasonic E640) UV Ozone Reactor Plasma Clean (Gasonics 2000) XeF2 Etch (Xetch) Plasma Activation (EVG 810) HF Vapor Etch

Wet Processing

Gold Plating Bench Critical Point Dryer Spin Rinse Dryer (SemiTool) Chemical-Mechanical Polisher (Logitech)

Wet Benches Acid Benches Solvent Benches Photoresist Spin Coat Benches Develop Wet Benches

Thermal Processing

• Rapid Thermal Processor (AET RX6)
• Strip Annealer
• Tube Furnace (Tystar 8300)
• Tube Furnace Wafer Bonding (Thermco)
• Tube Furnace AlGaAs Oxidation (Linberg)

Packaging

• Flip-Chip Bonder (Finetech)
• Vacuum Sealer
• Dicing Saw (ADT)
• Wire Saw (Takatori)

Inspection, Test and Characterization

Field Emission SEM 1 (FEI Sirion) Field Emission SEM 2 (JEOL 7600F) Step Profile (Dektak IIA) Step Profilometer (Dektak 6M) Ellipsometer (Rudolph) Microscopes Probe Station & Curve Tracer Optical Film Thickness (Filmetrics) Optical Film Thickness (Nanometric) Goniometer

Tencor Flexus Film Stress SEM Sample Coater (Hummer) Surface Analysis (KLA/Tencor Surfscan) Photo-emission & IR Microscope (QFI) Ellipsometer (Woollam) 4-Point Probe Resistivity Mapper Laser Scanning Confocal M-scope (Olympus LEXT) Deep UV Optical Microscope (Olympus) Atomic Force Microsope (Dimension 3100/Nanoscope IVA)