Difference between revisions of "Tool List"

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(Wet Processing)
(Wet Processing)
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* [[Wet Benches]]
 
* [[Wet Benches]]
**[[Acid Benches]]
+
**[[Solvent Cleaning Benches]]
**[[Solvent Benches]]
+
**[[Spin Coat Benches]]
**[[Photoresist Spin Coat Benches]]
+
**[[Develop Benches]]
**[[Develop Wet Benches]]
+
**[[Toxic Corrosive Benches]]
  +
**[[HF/TMAH Processing Benches]]
  +
**[[Plating Bench]]
 
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Revision as of 07:19, 12 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization