Difference between revisions of "Tool List"

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(Packaging)
(Inspection, Test and Characterization)
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* [[Photo-emission & IR Microscope (QFI)]]
 
* [[Photo-emission & IR Microscope (QFI)]]
 
* [[Ellipsometer (Woollam)]]
 
* [[Ellipsometer (Woollam)]]
* [[4-Point Probe Resistivity Mapper]]
+
* [[Resistivity Mapper (CDE RESMAP)]]
 
* [[Laser Scanning Confocal M-scope (Olympus LEXT)]]
 
* [[Laser Scanning Confocal M-scope (Olympus LEXT)]]
 
* [[Deep UV Optical Microscope (Olympus)]]
 
* [[Deep UV Optical Microscope (Olympus)]]

Revision as of 10:45, 11 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization