Difference between revisions of "Tool List"

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(Inspection, Test and Characterization)
(Lithography)
Line 9: Line 9:
 
* [[Ovens 1, 2 & 3 (Labline)]]
 
* [[Ovens 1, 2 & 3 (Labline)]]
 
* [[Oven 4 (Fisher)]]
 
* [[Oven 4 (Fisher)]]
* [[Oven 5 (Blue M)]]
+
* [[High Temp Oven (Blue M)]]
 
* [[Vacuum Oven (YES)]]
 
* [[Vacuum Oven (YES)]]
 
* [[Holographic Lith/PL Setup (Custom)]]
 
* [[Holographic Lith/PL Setup (Custom)]]

Revision as of 10:11, 11 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization