Difference between revisions of "Tool List"

From UCSB Nanofab Wiki
Jump to: navigation, search
(Packaging)
(Vacuum Deposition)
Line 42: Line 42:
 
*[[Thermal Evap 1]]
 
*[[Thermal Evap 1]]
 
*[[Thermal Evap 2 (Solder)]]
 
*[[Thermal Evap 2 (Solder)]]
*[[Unaxis VLR ICP-PECVD]]
+
*[[ICP-PECVD (Unaxis VLR)]]
 
*[[Ion Beam Deposition (Veeco NEXUS)]]
 
*[[Ion Beam Deposition (Veeco NEXUS)]]
 
*[[Molecular Vapor Deposition]]
 
*[[Molecular Vapor Deposition]]

Revision as of 06:48, 11 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization