Difference between revisions of "Tool List"

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(Lithography)
(Lithography)
Line 15: Line 15:
 
* [[Stepper 1 (GCA 6300)]]
 
* [[Stepper 1 (GCA 6300)]]
 
* [[Stepper 2 (AutoStep 200)]]
 
* [[Stepper 2 (AutoStep 200)]]
* [[Stepper 3 (ASML)]]
+
* [[Stepper 3 (ASML DUV)]]
 
* [[E-Beam Lithography System (JEOL JBX-6300FS)]]
 
* [[E-Beam Lithography System (JEOL JBX-6300FS)]]
 
* [[Nano-Imprint (Nanonex NX2000)]]
 
* [[Nano-Imprint (Nanonex NX2000)]]

Revision as of 06:00, 11 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization