Difference between revisions of "Tool List"

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(Dry Etch)
(Lithography)
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* [[Oven 5 (Blue M)]]
 
* [[Oven 5 (Blue M)]]
 
* [[Vacuum Oven (YES)]]
 
* [[Vacuum Oven (YES)]]
* [[Holographic Lith/PL Setup]]
+
* [[Holographic Lith/PL Setup (Custom)]]
 
|width=400|
 
|width=400|
 
* [[Stepper 1 (GCA 6300)]]
 
* [[Stepper 1 (GCA 6300)]]

Revision as of 05:56, 11 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization