Difference between revisions of "Tool List"

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(Inspection, Test and Characterization)
(Dry Etch)
Line 69: Line 69:
 
*[[Plasma Clean (Gasonics 2000)]]
 
*[[Plasma Clean (Gasonics 2000)]]
 
*[[XeF2 Etch (Xetch)|XeF<sub>2</sub> Etch (Xetch)]]
 
*[[XeF2 Etch (Xetch)|XeF<sub>2</sub> Etch (Xetch)]]
*[[Plasma Activation Tool (EVG 810)]]
+
*[[Plasma Activation (EVG 810)]]
 
*[[HF Vapor Etch]]
 
*[[HF Vapor Etch]]
   

Revision as of 05:41, 11 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization