Difference between revisions of "Tool List"

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(Wet Processing)
(Inspection, Test and Characterization)
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* [[Optical Film Thickness (Filmetrics)]]
 
* [[Optical Film Thickness (Filmetrics)]]
 
* [[Optical Film Thickness (Nanometric)]]
 
* [[Optical Film Thickness (Nanometric)]]
  +
* [[Atomic Force Microsope (Dimension 3100/Nanoscope IVA)]]
* [[Scanning Probe Microscope (Veeco NanoMan)]]
 
 
|width=400|
 
|width=400|
 
* [[Tencor Flexus Film Stress]]
 
* [[Tencor Flexus Film Stress]]
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* [[Laser Scanning Confocal M-scope (Olympus LEXT)]]
 
* [[Laser Scanning Confocal M-scope (Olympus LEXT)]]
 
* [[Deep UV Optical Microscope (Olympus)]]
 
* [[Deep UV Optical Microscope (Olympus)]]
* [[Atomic Force Microsope (Dimension 3100/Nanoscope IVA)]]
 
 
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|-
 
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Revision as of 18:26, 10 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization