Difference between revisions of "Tool List"

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(Vacuum Deposition)
(Wet Processing)
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* [[Critical Point Dryer]]
 
* [[Critical Point Dryer]]
 
* [[Spin Rinse Dryer (SemiTool)]]
 
* [[Spin Rinse Dryer (SemiTool)]]
* [[Scales]]
 
** [[Wet Etch Wafer Scale]]
 
** [[Solvent Processing Wafer Scale]]
 
|width=400|
 
 
* [[Chemical-Mechanical Polisher (Logitech)]]
 
* [[Chemical-Mechanical Polisher (Logitech)]]
  +
|width=400|
 
* Wet Benches
 
* Wet Benches
 
**[[Acid Benches]]
 
**[[Acid Benches]]

Revision as of 13:50, 10 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization