Difference between revisions of "Tool List"

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(Inspection, Test and Characterization)
(Vacuum Deposition)
Line 42: Line 42:
 
*[[PECVD 2 (Advanced Vacuum)]]
 
*[[PECVD 2 (Advanced Vacuum)]]
 
*[[Thermal Evap 1]]
 
*[[Thermal Evap 1]]
*[[Thermal Evap 2]]
+
*[[Thermal Evap 2 (Solder)]]
 
*[[Unaxis VLR ICP-PECVD]]
 
*[[Unaxis VLR ICP-PECVD]]
 
*[[Ion Beam Deposition (Veeco NEXUS)]]
 
*[[Ion Beam Deposition (Veeco NEXUS)]]

Revision as of 12:00, 10 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization