Difference between revisions of "Tool List"

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(Lithography)
(Inspection, Test and Characterization)
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* [[Laser Scanning Confocal M-scope (Olympus LEXT)]]
 
* [[Laser Scanning Confocal M-scope (Olympus LEXT)]]
 
* [[Deep UV Optical Microscope (Olympus)]]
 
* [[Deep UV Optical Microscope (Olympus)]]
  +
* [[Atomic Force Microsope (Dimension 3100/Nanoscope IVA)]]
 
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Revision as of 08:41, 10 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization