Difference between revisions of "Tool List"

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(Inspection, Test and Characterization)
(Wet Processing)
Line 89: Line 89:
 
* [[Wet Benches]]
 
* [[Wet Benches]]
 
**[[Photoresist Spin Benches]]
 
**[[Photoresist Spin Benches]]
  +
**[[Solvent Benches]]
 
**[[Lithography Development & Solvent Clean Benches]]
 
**[[Lithography Development & Solvent Clean Benches]]
 
**[[Wet Etch Benches]]
 
**[[Wet Etch Benches]]

Revision as of 07:18, 10 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization