Difference between revisions of "Tool List"
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* [[Wet Benches]] |
* [[Wet Benches]] |
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**[[Photoresist Spin Benches]] |
**[[Photoresist Spin Benches]] |
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| + | **[[Solvent Benches]] |
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**[[Lithography Development & Solvent Clean Benches]] |
**[[Lithography Development & Solvent Clean Benches]] |
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**[[Wet Etch Benches]] |
**[[Wet Etch Benches]] |
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Revision as of 08:18, 10 July 2012
Lithography
Vacuum Deposition
Dry Etch
Wet Processing
Thermal Processing
- Rapid Thermal Processor (AET RX6)
- Strip Annealer
- Tube Furnace (Tystar 8300)
- Tube Furnace Wafer Bonding (Thermco)
- Tube Furnace AlGaAs Oxidation (Linberg)