Difference between revisions of "Tool List"

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(Undo revision 598 by Zwarburg (Talk))
(Inspection, Test and Characterization)
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* [[Optical Film Thickness (Nanometric)]]
 
* [[Optical Film Thickness (Nanometric)]]
 
* [[Scanning Probe Microscope (Veeco NanoMan)]]
 
* [[Scanning Probe Microscope (Veeco NanoMan)]]
* [[ Surfscan 6200]]
 
 
|width=400|
 
|width=400|
 
* [[Tencor Flexus Film Stress]]
 
* [[Tencor Flexus Film Stress]]

Revision as of 06:18, 10 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization