Difference between revisions of "Tool List"

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(Vacuum Deposition)
(Dry Etch)
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| width="400" |
 
| width="400" |
*[[ICP Etch 1 (Panasonic E620)]]
+
*[[ICP Etch 1 (Panasonic E626I)]]
*[[ICP Etch 2 (Panasonic E626)]]
+
*[[ICP Etch 2 (Panasonic E640)]]
 
*[[UV Ozone Reactor]]
 
*[[UV Ozone Reactor]]
 
*[[Plasma Clean (Gasonics 2000)]]
 
*[[Plasma Clean (Gasonics 2000)]]

Revision as of 11:13, 9 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization