Difference between revisions of "Tool List"

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(Inspection, Test and Characterization)
(Vacuum Deposition)
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* [[Sputter 1 (Custom)]]
 
* [[Sputter 1 (Custom)]]
 
* [[Sputter 2 (SFI Endeavor)]]
 
* [[Sputter 2 (SFI Endeavor)]]
* [[Sputter 3 (AJA)]]
+
* [[Sputter 3 (AJA 2000-F)]]
* [[Sputter 4 (AJA)]]
+
* [[Sputter 4 (AJA 2200-V)]]
 
* [[Sputter 5 (Lesker AXXIS)]]
 
* [[Sputter 5 (Lesker AXXIS)]]
 
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Revision as of 11:13, 9 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization