Difference between revisions of "Tool List"

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(Dry Etch)
Line 68: Line 68:
 
*[[XeF2 Etch (Xetch)|XeF<sub>2</sub> Etch (Xetch)]]
 
*[[XeF2 Etch (Xetch)|XeF<sub>2</sub> Etch (Xetch)]]
 
*[[Plasma Activation (EVG 810)]]
 
*[[Plasma Activation (EVG 810)]]
*[[HF Vapor Etch]]
+
*[[Vapor HF Etch]]
   
 
|}
 
|}

Revision as of 15:24, 31 January 2014

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization