Difference between revisions of "Tool List"
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| − | * [[E-Beam 1]] |
+ | * [[E-Beam 1 (Sharon)]] |
| − | * [[E-Beam 2]] |
+ | * [[E-Beam 2 (Custom)]] |
| − | * [[E-Beam 3]] |
+ | * [[E-Beam 3 (Temescal)]] |
| − | * [[E-Beam 4]] |
+ | * [[E-Beam 4 (CHA)]] |
* [[Sputter 1 (Custom)]] |
* [[Sputter 1 (Custom)]] |
||
* [[Sputter 2 (SFI Endeavor)]] |
* [[Sputter 2 (SFI Endeavor)]] |
||
Revision as of 11:34, 28 June 2012
Lithography
Vacuum Deposition
Dry Etch
Wet Processing
Thermal Processing
- Rapid Thermal Processor
- Strip Annealer
- Tube Furnace (Tystar 8300)
- Tube Furnace Wafer Bonding (Thermco)
- Tube Furnace AlGaAs Oxidation (Linberg)
Packaging
Inspection, Test and Characterization
- Field Emission SEM 1
- Field Emission SEM 2
- Step Profile
- Step Profilometer
- Ellipsometer
- Microscopes
- Probe Station & Curve Tracer
- Optical Film Thickness (Filmetrics)
- Scanning Probe Microscope
- Tencor Flexus Film Stress
- Optical Film Thickness (Nanometric)
- SEM Sample Coater
- Surface Analysis
- Photo-emission & IR Microscope
- Ellipsometer (Woollam)
- Goniometer
- 4-Point Probe Resistivity Mapper