Difference between revisions of "Tool List"

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(Dry Etch)
(Lithography)
Line 9: Line 9:
 
* [[Ovens]]
 
* [[Ovens]]
 
|width=200|
 
|width=200|
* [[Stepper 1]]
+
* [[Stepper 1 (GCA 6300)]]
* [[Stepper 2]]
+
* [[Stepper 2 (AutoStep 200)]]
 
* [[Stepper 3 (ASML)]]
 
* [[Stepper 3 (ASML)]]
 
* [[E-Beam Lithography System]]
 
* [[E-Beam Lithography System]]

Revision as of 10:27, 28 June 2012