Difference between revisions of "Tool List"

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(Lithography)
(Dry Etch)
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* [[Si Deep RIE]]
 
* [[Si Deep RIE]]
 
* [[Ashers]]
 
* [[Ashers]]
* [[VLR Etch]]
+
* [[Unaxis VLR ICP-Etch]]
 
|width=200|
 
|width=200|
 
* [[ICP Etch 1]]
 
* [[ICP Etch 1]]

Revision as of 09:57, 28 June 2012