Difference between revisions of "Tool List"

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(Thermal Processing)
(Lithography)
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|-valign="top"
 
|-valign="top"
 
|width=200|
 
|width=200|
* [[Suss Aligners]]
+
* [[Suss Aligners (MJB-3)]]
* [[IR Aligner]]
+
* [[IR Aligner (MJB-3 IR)]]
 
* [[DUV Flood Expose]]
 
* [[DUV Flood Expose]]
 
* [[Ovens]]
 
* [[Ovens]]
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* [[Stepper 3 (ASML)]]
 
* [[Stepper 3 (ASML)]]
 
* [[E-Beam Lithography System]]
 
* [[E-Beam Lithography System]]
  +
* [[Nano-Imprint Tool (Nanonex NX2000)]]
 
|-
 
|-
 
|}
 
|}

Revision as of 06:31, 28 June 2012