Difference between revisions of "Tool List"

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(Dry Etch)
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*[[Ashers (Technics PEII)]]
 
*[[Ashers (Technics PEII)]]
 
*[[UV Ozone Reactor]]
 
*[[UV Ozone Reactor]]
  +
*[[CAIBE (Oxford Ion Mill)]]
 
| width="400" |
 
| width="400" |
 
*[[ICP Etch 1 (Panasonic E626I)]]
 
*[[ICP Etch 1 (Panasonic E626I)]]

Revision as of 09:46, 9 July 2015

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization