Difference between revisions of "Tool List"

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(Dry Etch)
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*[[RIE 1 (Custom)]]
 
 
*[[RIE 2 (MRC)]]
 
*[[RIE 2 (MRC)]]
 
*[[RIE 3 (MRC)]]
 
*[[RIE 3 (MRC)]]

Revision as of 14:00, 13 June 2015

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization