Difference between revisions of "Tool List"

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(Wet Processing)
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=Lithography=
 
=Lithography=
 
{|
 
{|
|-valign="top"
+
|-valign="top"
 
|width=300|
 
|width=300|
 
* [[Suss Aligners (SUSS MJB-3)]]
 
* [[Suss Aligners (SUSS MJB-3)]]
 
* [[IR Aligner (SUSS MJB-3 IR)]]
 
* [[IR Aligner (SUSS MJB-3 IR)]]
* [[DUV Flood Expose]]
+
* [[DUV Flood Expsaad3 (Labline)]]
* [[Ovens 1, 2 & 3 (Labline)]]
 
 
* [[Oven 4 (Fisher)]]
 
* [[Oven 4 (Fisher)]]
 
* [[High Temp Oven (Blue M)]]
 
* [[High Temp Oven (Blue M)]]

Revision as of 14:48, 16 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization