Difference between revisions of "Tool List"

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(Inspection, Test and Characterization)
(Wet Processing)
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|-valign="top"
 
|-valign="top"
 
|width=300|
 
|width=300|
* [[Gold Plating Bench]]
 
* [[Critical Point Dryer]]
 
* [[Spin Rinse Dryer (SemiTool)]]
 
* [[Chemical-Mechanical Polisher (Logitech)]]
 
|width=400|
 
 
* [[Wet Benches]]
 
* [[Wet Benches]]
 
**[[Solvent Cleaning Benches]]
 
**[[Solvent Cleaning Benches]]
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**[[HF/TMAH Processing Benches]]
 
**[[HF/TMAH Processing Benches]]
 
**[[Plating Bench]]
 
**[[Plating Bench]]
  +
|width=400|
  +
* [[Gold Plating Bench]]
  +
* [[Critical Point Dryer]]
  +
* [[Spin Rinse Dryer (SemiTool)]]
  +
* [[Chemical-Mechanical Polisher (Logitech)]]
 
|-
 
|-
 
|}
 
|}

Revision as of 06:16, 16 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization