Difference between revisions of "Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer)"
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|[https://www.nanotech.ucsb.edu/wiki/images/f/fa/SiO2_Etch_using_ICP2_with_O2-a.pdf] |
|[https://www.nanotech.ucsb.edu/wiki/images/f/fa/SiO2_Etch_using_ICP2_with_O2-a.pdf] |
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+ | |- |
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+ | |3/6/2019 |
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+ | |I21903 |
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+ | |88.5 |
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+ | |0.80 |
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+ | |79.4 |
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