Template:Announcements

UCSB NanoFab Announcements

Solvent Bench Bay 7 - Bath down, bench up

Heated bath is still down until auto-water fill is set up. Rest of bench is OK for use. //Thibeault 10:41, 26 May 2018 (PDT)

Plasma Therm DSEIII DOWN

Plasma Therm DSEII is down due to wafer stuck in chamber. Will be resolved Tuesday morning at latest. //Thibeault 10:41, 26 May 2018 (PDT)

RIE#2 DOWN

RIE2 is down due to RF matching issues. //Thibeault 10:38, 26 May 2018 (PDT)

RIE#5: No SiCl4

We should have a new cylinder of SiCl4 in two weeks. Until then we are out of SiCl4. // John d 21:40, 14 May 2018 (PDT)

FEI SEM Down

Door issue is still nor resolved. Down until further notice. // Thibeault 17:27, 24 May 2018 (PDT)

PECVD#2 is Up

The Plasma Therm Cortex software update is complete, and the system is operational. Standard recipes requalified. Particle counts are now much lower and around historical levels. All users need retraining on the new software. Contact Mike Silva for training. // Thibeault 17:25, 24 May 2018 (PDT)