Difference between revisions of "Template:Announcements"
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| + | ===== Plasma Therm DSEIII DOWN ===== |
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| + | Plasma Therm DSEII is down due to wafer stuck in chamber. Will be resolved Tuesday morning at latest. |
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| + | //10:41, 26 May 2018 (PDT) |
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===== RIE#2 DOWN ===== |
===== RIE#2 DOWN ===== |
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RIE2 is down due to RF matching issues. |
RIE2 is down due to RF matching issues. |
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Revision as of 10:41, 26 May 2018
UCSB NanoFab Announcements
Plasma Therm DSEIII DOWN
Plasma Therm DSEII is down due to wafer stuck in chamber. Will be resolved Tuesday morning at latest. //10:41, 26 May 2018 (PDT)
RIE#2 DOWN
RIE2 is down due to RF matching issues. //Thibeault 10:38, 26 May 2018 (PDT)
RIE#5: No SiCl4
We should have a new cylinder of SiCl4 in two weeks. Until then we are out of SiCl4. // John d 21:40, 14 May 2018 (PDT)
FEI SEM Down
Door issue is still nor resolved. Down until further notice. // Thibeault 17:27, 24 May 2018 (PDT)
PECVD#2 is Up
The Plasma Therm Cortex software update is complete, and the system is operational. Standard recipes requalified. Particle counts are now much lower and around historical levels. All users need retraining on the new software. Contact Mike Silva for training. // Thibeault 17:25, 24 May 2018 (PDT)