Difference between revisions of "Template:Announcements"
Jump to navigation
Jump to search
(fab open, maintenance complete) |
|||
Line 22: | Line 22: | ||
// [[User:John d|John d]] 16:19, 16 May 2018 (PDT) |
// [[User:John d|John d]] 16:19, 16 May 2018 (PDT) |
||
− | ===== PECVD#2 |
+ | ===== PECVD#2 is Up ===== |
− | The Plasma Therm Cortex software update is complete, and the system is operational. Standard recipes requalified. Particle counts are now much lower and around historical levels. |
+ | The Plasma Therm Cortex software update is complete, and the system is operational. Standard recipes requalified. Particle counts are now much lower and around historical levels. All users need retraining on the new software. Contact Mike Silva for training. |
⚫ | |||
− | The system is still down. PlasmaTherm is here working to resolve the outstanding issues since the software update. I am not sure how long it will take them to have the system operating properly. I will send out an email once I have more information. Training will be announced soon. |
||
⚫ | |||
Revision as of 17:25, 24 May 2018
UCSB NanoFab Announcements
NanoFab is OPEN
Fire System and Exhaust work is completed, the lab is open for use. // John d 09:09, 18 May 2018 (PDT)
RIE#5: No SiCl4
We should have a new cylinder of SiCl4 in two weeks. Until then we are out of SiCl4. // John d 21:40, 14 May 2018 (PDT)
Stepper #2: Up
Then turn table issue has been resolved. The system has been calibrated and is ready for your use. // John d 16:19, 16 May 2018 (PDT)
PECVD#2 is Up
The Plasma Therm Cortex software update is complete, and the system is operational. Standard recipes requalified. Particle counts are now much lower and around historical levels. All users need retraining on the new software. Contact Mike Silva for training. // Thibeault 17:25, 24 May 2018 (PDT)