Difference between revisions of "Template:Announcements"
(asml update) |
(asml PM moved) |
||
| (6 intermediate revisions by 2 users not shown) | |||
| Line 10: | Line 10: | ||
<!------------- Equipment Status ----------------> |
<!------------- Equipment Status ----------------> |
||
| − | ===== |
+ | ===== GCA Autosetp Maintenance ===== |
| + | The system will be down for service Monday January 20, 2020 until late afternoon Wednesday January 22nd. |
||
| − | Parts on order for Level Sensor lamp assembly replacement, will likely get an ASML technician on site on Monday Jan 6th. |
||
| − | + | [[User:Silva|Silva]] 08:14, 16 January 2020 (PST) |
|
| + | |||
| + | ===== GCA 6300 Maintenance ===== |
||
| + | The system will be down for service Thursday January 23, 2020 until late afternoon. |
||
| + | [[User:Silva|Silva]] 08:15, 16 January 2020 (PST) |
||
| + | |||
| + | ===== MOVED: ASML Maintenance: March 30th ===== |
||
| + | Accommodating user requests, we have moved the periodic maintenance to Monday March 30th. The PM will still be on the order of 1.5 weeks at that time. Please let me know if you have any questions or see any calibration drifts in the mean time. |
||
| + | // [[User:John d|John d]] 16:25, 16 January 2020 (PST) |
||
===== Unaxis ICP-PECVD ===== |
===== Unaxis ICP-PECVD ===== |
||
Revision as of 17:25, 16 January 2020
Equipment Status
GCA Autosetp Maintenance
The system will be down for service Monday January 20, 2020 until late afternoon Wednesday January 22nd. Silva 08:14, 16 January 2020 (PST)
GCA 6300 Maintenance
The system will be down for service Thursday January 23, 2020 until late afternoon. Silva 08:15, 16 January 2020 (PST)
MOVED: ASML Maintenance: March 30th
Accommodating user requests, we have moved the periodic maintenance to Monday March 30th. The PM will still be on the order of 1.5 weeks at that time. Please let me know if you have any questions or see any calibration drifts in the mean time. // John d 16:25, 16 January 2020 (PST)
Unaxis ICP-PECVD
The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)
Suss Bonder
Suss Bonder is DOWN. The vendor is struggling to get the software and hardware upgrades to work. We have a meeting next week, 10/28/19, to discuss options. Silva 11:16, 25 October 2019 (PDT)