Surface Analysis (KLA/Tencor Surfscan)

From UCSB Nanofab Wiki

Revision as of 10:53, 22 August 2012 by Zwarburg (talk | contribs)

(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)

Jump to navigation Jump to search

Surface Analysis (KLA/Tencor Surfscan)

Tool Type	Inspection, Test and Characterization
Location	Bay 5

Description	?
Manufacturer	Tencor

About

Documentation

Operations Manual

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Surface_Analysis_(KLA/Tencor_Surfscan)&oldid=2090"