Difference between revisions of "Surface Analysis (KLA/Tencor Surfscan)"
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|super= Biljana Stamenic |
|super= Biljana Stamenic |
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|location=Bay 5 |
|location=Bay 5 |
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| − | |description = |
+ | |description = Surface Analysis |
| + | KLA/Tencor Surfscan |
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|manufacturer = Tencor |
|manufacturer = Tencor |
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|materials = |
|materials = |
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|toolid= |
|toolid= |
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}} |
}} |
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| − | =About= |
+ | ==About== |
| − | This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface. |
+ | This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface. It can scan wafers in size from 4 to 6 inches. |
| − | =Documentation= |
+ | ==Documentation== |
| + | *[[KLA-Tencor Surfscan - Standard Operating Procedure|Standard Operating Procedure]] |
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*[[media:Surfscan-Operation-Manual.pdf|Operations Manual]] |
*[[media:Surfscan-Operation-Manual.pdf|Operations Manual]] |
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| + | **''For detailed measurement info, it is highly recommended that you read the manual.'' |
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| + | *[[media:Surfscan-Surfscan 6200 info.pdf|Surfscan Info]] |
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| + | |||
| + | === Screenshots === |
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| + | [[File:UCSBTEST.png|left|thumb|'''UCSBTEST2''' for big size particles '''(1.6-28.0)um''']][[File:UCSBTEST2 for small particles.png|left|thumb|'''UCSBTEST2''' for small size particles '''(0.16-1.6)um''']] |
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Revision as of 09:44, 11 April 2019
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About
This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface. It can scan wafers in size from 4 to 6 inches.
Documentation
- Standard Operating Procedure
- Operations Manual
- For detailed measurement info, it is highly recommended that you read the manual.
- Surfscan Info
