Difference between revisions of "Surface Analysis (KLA/Tencor Surfscan)"
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=Documentation= |
=Documentation= |
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*[[media:Surfscan-Operation-Manual.pdf|Operations Manual]] |
*[[media:Surfscan-Operation-Manual.pdf|Operations Manual]] |
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| + | *[[media:Surfscan-Surfscan 6200 info.pdf|Surfscan Info]] |
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| + | *[[Surfscan6200 photos]] |
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Revision as of 09:53, 12 April 2016
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About
This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface.