Difference between revisions of "Step Profilometer (KLA Tencor P-7)"
Jump to navigation
Jump to search
(→Instructions: "Saving+Extracting data" - link to nonexistent page) |
(updated specs) |
||
| (5 intermediate revisions by 3 users not shown) | |||
| Line 1: | Line 1: | ||
| − | {{ |
+ | {{tool2|{{PAGENAME}} |
|picture=KLA-Tencor-P7_Photo.JPG |
|picture=KLA-Tencor-P7_Photo.JPG |
||
|type = Inspection, Test and Characterization |
|type = Inspection, Test and Characterization |
||
| − | |super= |
+ | |super= Bill Millerski |
| + | |super2= Aidan Hopkins |
||
|phone=(805)839-3918x210 |
|phone=(805)839-3918x210 |
||
|location=Bay 4 |
|location=Bay 4 |
||
| Line 9: | Line 10: | ||
|materials = |
|materials = |
||
}} |
}} |
||
| − | == |
+ | ==About== |
| + | The KLA-Tencor P7 profilometer is a stylus profilometer that drags a stylus across the wafer surface with controlled pressure, aligned via microcope, and measures the step-heights of surface features during the measurement. The system has a motor-controlled stage for X/Y/Rotation, and is typically used to measure step heights in single areas on various sample sizes frmo small pieces to 4-inch wafers. It can be programmed to scan multiple locations on a single wafer or 3D areas topography. |
||
| − | The KLA Tencor info will be here |
||
==Detailed Specifications== |
==Detailed Specifications== |
||
| − | *More info to go here |
||
| + | *Probe Tip: 2um radius and 60° angle |
||
| ⚫ | |||
| + | *Maximum wafer size: 6-inch |
||
| ⚫ | |||
| + | *1D Profile and 2D Raster Scanning |
||
| ⚫ | |||
| + | *Automated Measurement Routines |
||
| + | |||
| ⚫ | |||
| + | |||
| ⚫ | |||
| ⚫ | |||
Latest revision as of 23:06, 4 April 2024
| ||||||||||||||||||||||||||
About
The KLA-Tencor P7 profilometer is a stylus profilometer that drags a stylus across the wafer surface with controlled pressure, aligned via microcope, and measures the step-heights of surface features during the measurement. The system has a motor-controlled stage for X/Y/Rotation, and is typically used to measure step heights in single areas on various sample sizes frmo small pieces to 4-inch wafers. It can be programmed to scan multiple locations on a single wafer or 3D areas topography.
Detailed Specifications
- Probe Tip: 2um radius and 60° angle
- Maximum wafer size: 6-inch
- 1D Profile and 2D Raster Scanning
- Automated Measurement Routines