Difference between revisions of "Step Profilometer (KLA Tencor P-7)"
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− | == |
+ | ==About== |
The KLA Tencor info will be here |
The KLA Tencor info will be here |
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==Detailed Specifications== |
==Detailed Specifications== |
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− | *More info to go here |
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+ | *Probe Tip has a 2um radius and a 60 degree angle |
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+ | *Maximum wafer size: ____ |
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+ | *1D Profile and 2D Raster Scanning |
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+ | *Lateral Resolution: _____ |
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+ | *Height Resolution: _____ |
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+ | *[[KLA Tencor P7 - Saving Profile Data|Saving+Extracting Profile Data]] |
Revision as of 11:46, 6 September 2019
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About
The KLA Tencor info will be here
Detailed Specifications
- Probe Tip has a 2um radius and a 60 degree angle
- Maximum wafer size: ____
- 1D Profile and 2D Raster Scanning
- Lateral Resolution: _____
- Height Resolution: _____