Difference between revisions of "Step Profilometer (KLA Tencor P-7)"

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|phone=(805)839-3918x210
 
|phone=(805)839-3918x210
 
|location=Bay 4
 
|location=Bay 4
|email=lingg_b@ucsb.edu
 
 
|description = Surface Profilometer
 
|description = Surface Profilometer
 
|manufacturer = KLA Tencor
 
|manufacturer = KLA Tencor
 
|materials =
 
|materials =
 
}}
 
}}
== About ==
+
==About==
 
The KLA Tencor info will be here
 
The KLA Tencor info will be here
   
 
==Detailed Specifications==
 
==Detailed Specifications==
*More info to go here
 
   
  +
*Probe Tip has a 2um radius and a 60 degree angle
== Instructions ==
 
  +
*Maximum wafer size: ____
* [[KLA Tencor P7 - Basic profile instructions|Basic profile instructions]]
 
  +
*1D Profile and 2D Raster Scanning
  +
*Lateral Resolution: _____
  +
*Height Resolution: _____
  +
  +
==Instructions==
  +
  +
*[[KLA Tencor P7 - Basic profile instructions|Basic profile instructions]]
  +
*[[KLA Tencor P7 - Saving Profile Data|Saving+Extracting Profile Data]]

Latest revision as of 10:46, 6 September 2019

Step Profilometer (KLA Tencor P-7)
KLA-Tencor-P7 Photo.JPG
Tool Type Inspection, Test and Characterization
Location Bay 4
Supervisor Brian Lingg
Supervisor Phone (805) 893-8145
Supervisor E-Mail lingg_b@ucsb.edu
Description Surface Profilometer
Manufacturer KLA Tencor


About

The KLA Tencor info will be here

Detailed Specifications

  • Probe Tip has a 2um radius and a 60 degree angle
  • Maximum wafer size: ____
  • 1D Profile and 2D Raster Scanning
  • Lateral Resolution: _____
  • Height Resolution: _____

Instructions