Difference between revisions of "Sputter 5 (AJA ATC 2200-V)"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
Line 9: Line 9:
 
|picture=Sputter5.jpg
 
|picture=Sputter5.jpg
 
|type = Vacuum Deposition
 
|type = Vacuum Deposition
|super= Mike Silva
+
|super= Tony Bosch
 
|location=Bay 3
 
|location=Bay 3
 
|description = ?
 
|description = ?
|manufacturer = Kurt J Lesker
+
|manufacturer = AJA ATC 2200-V
 
|materials =
 
|materials =
 
|toolid=
 
|toolid=

Revision as of 10:58, 1 May 2018

==

Heading text

==

Heading text
====
==
Sputter 5 (AJA ATC 2200-V)
Sputter5.jpg
Tool Type Vacuum Deposition
Location Bay 3
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description ?
Manufacturer AJA ATC 2200-V
Vacuum Deposition Recipes